ABOUT Product
BRIGHT & KIND LEADING, BKL
Blank mask for Photo mask
1Blank Mask
- SODA LIME
- QUARTZ
SODA LIME
소형
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| Type |
Dimension and Thickness (inch) |
Flatness (μm) | Dimension (mm) | Thickness (mm) | ||
|---|---|---|---|---|---|---|
| min | max | min | max | |||
| 3004 | 3.0×3.0×0.06 | ≤5 | 75.4 | 76.2 | 0.90 | 1.05 |
| 3006 | 3.0×3.0×0.06 | ≤5 | 75.4 | 76.2 | 1.40 | 1.60 |
| 4004 | 4.0×4.0×0.04 | ≤5 | 100.8 | 101.6 | 0.90 | 1.05 |
| 4006 | 4.0×4.0×0.06 | ≤5 | 100.8 | 101.6 | 1.40 | 1.55 |
| 4008 | 4.0×4.0×0.08 | ≤5 | 100.8 | 101.6 | 1.95 | 2.05 |
| 4009 | 4.0×4.0×0.09 | ≤5 | 100.8 | 101.6 | 2.20 | 2.40 |
| 4010 | 4.0×4.0×0.10 | ≤5 | 100.8 | 101.6 | 2.44 | 2.64 |
| 4012 | 4.0×4.0×0.12 | ≤5 | 100.8 | 101.6 | 2.95 | 3.05 |
| 5002 | 5.0×5.0×0.02 | ≤20 | 126.2 | 127.0 | 0.45 | 0.55 |
| 5004 | 5.0×5.0×0.04 | ≤20 | 126.2 | 127.0 | 0.95 | 1.05 |
| 5009 | 5.0×5.0×0.09 | ≤8 | 126.2 | 127.0 | 2.20 | 2.40 |
| 6009 | 6.0×6.0×0.09 | ≤10 | 151.6 | 152.4 | 2.20 | 2.40 |
| 6012 | 6.0×6.0×0.12 | ≤10 | 151.6 | 152.4 | 2.95 | 3.15 |
| 6023 | 6.0×6.0×0.23 | ≤10 | 151.6 | 152.4 | 5.75 | 5.95 |
| 6025 | 6.0×6.0×0.25 | ≤10 | 151.6 | 152.4 | 6.25 | 6.45 |
| 7009 | 7.0×7.0×0.09 | ≤15 | 177.0 | 177.8 | 2.20 | 2.40 |
| 7012 | 7.0×7.0×0.12 | ≤15 | 177.0 | 177.8 | 2.95 | 3.15 |
중대형
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| Model.No | Dimension (mm) | Thickness (mm) | Flatness (μm) |
|---|---|---|---|
| 9012 | 228.4±0.2×228.4±0.2 | 3.1±0.05 | ≤30 |
| 11＂×11＂×4.8 | 279.4±0.4×279.4±0.4 | 4.8±0.2 | ≤70 |
| 11＂×14＂×4.8 | 279.4±0.4×355.6±0.4 | 4.8±0.2 | ≤70 |
| 12＂×12＂×3.0 | 304.8±0.4×304.8±0.4 | 3.0±0.2 | ≤70 |
| 11＂×14＂×4.8 | 304.8±0.4×304.8±0.4 | 4.8±0.2 | ≤70 |
| 350×350×3.0 | 350.0±0.4×350.0±0.4 | 3.0±0.2 | ≤70 |
| 14＂×14＂×3.0 | 355.6±0.4×355.6±0.4 | 3.0±0.2 | ≤70 |
| 14＂×14＂×4.8 | 355.6±0.4×355.6±0.4 | 4.8±0.2 | ≤70 |
| 400×400×3.0 | 400.0±0.4×400.0±0.4 | 3.0±0.2 | ≤70 |
| 14＂×17＂×3.0 | 355.6±0.4×431.8±0.4 | 3.0±0.2 | ≤70 |
| 14＂×17＂×4.8 | 355.6±0.4×431.8±0.4 | 4.8±0.2 | ≤70 |
| 350×470×4.8 | 350.0±0.4×470.0±0.4 | 4.8±0.2 | ≤70 |
| 400×450×3.0 | 400.0±0.4×450.0±0.4 | 3.0±0.2 | ≤70 |
| 400×450×4.8 | 400.0±0.4×450.0±0.4 | 4.8±0.2 | ≤70 |
| 16＂×16＂×3.0 | 406.4±0.4×406.4±0.4 | 3.0±0.2 | ≤70 |
| 16＂×18＂×3.0 | 406.4±0.4×457.2±0.4 | 3.0±0.2 | ≤70 |
| 430×480×4.8 | 430.0±0.4×480.0±0.4 | 4.8±0.2 | ≤70 |
| 17＂×17＂×3.0 | 431.8±0.4×431.8±0.4 | 3.0±0.2 | ≤70 |
| 17＂×19＂×4.8 | 431.8±0.4×482.6±0.4 | 4.8±0.2 | ≤70 |
| 420×450×3.0 | 420.0±0.4×450.0±0.4 | 3.0±0.2 | ≤70 |
| 420×520×3.0 | 420.0±0.4×520.0±0.4 | 3.0±0.2 | ≤70 |
| 420×520×4.8 | 420.0±0.4×520.0±0.4 | 4.8±0.2 | ≤70 |
| 420×530×4.8 | 420.0±0.4×530.0±0.4 | 4.8±0.2 | ≤70 |
| 430×480×4.8 | 430.0±0.4×480.0±0.4 | 4.8±0.2 | ≤70 |
| 450×550×3.0 | 450.0±0.4×550.0±0.4 | 3.0±0.2 | ≤70 |
| 450×550×4.8 | 450.0±0.4×550.0±0.4 | 4.8±0.2 | ≤70 |
| 20＂×24＂×3.0 | 508.0±0.4×609.6±0.4 | 3.0±0.2 | ≤70 |
| 20＂×24＂×4.8 | 508.0±0.4×609.6±0.4 | 4.8±0.2 | ≤70 |
초대형
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| Model.No | Dimension (mm) | Thickness (mm) | Flatness (μm) |
|---|---|---|---|
| 24＂×24＂×3.0 | 609.6±0.4×609.6±0.4 | 3.0±0.2 | ≤100 |
| 24＂×24＂×4.8 | 609.6±0.4×609.6±0.4 | 4.8±0.2 | ≤100 |
| 24＂×26＂×4.8 | 609.6±0.4×660.4±0.4 | 4.8±0.2 | ≤100 |
| 24＂×28＂×4.8 | 609.6±0.4×711.2±0.4 | 4.8±0.2 | ≤100 |
| 25＂×26＂×4.8 | 635.0±0.4×660.4±0.4 | 4.8±0.2 | ≤100 |
| 26＂×26＂×4.8 | 660.4±0.4×660.4±0.4 | 4.8±0.2 | ≤100 |
| 550×670×3.0 | 550.0±0.4×670.0±0.4 | 3.0±0.2 | ≤100 |
| 550×670×4.8 | 550.0±0.4×670.0±0.4 | 4.8±0.2 | ≤100 |
| 620×720×3.0 | 620±0.5×720±0.4 | 3.0±0.2 | ≤100 |
| 620×720×4.8 | 620±0.5×720±0.4 | 4.8±0.2 | ≤100 |
| 620×720×7.8 | 620±0.5×720±0.4 | 7.8±0.2 | ≤120 |
| 700×800×4.8 | 700±0.5×800±0.4 | 4.8±0.2 | ≤100 |
| 700×800×7.8 | 700±0.5×800±0.4 | 7.8±0.2 | ≤120 |
Photoresist type
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| Item | Resist | Area shape | ||
|---|---|---|---|---|
| Resist type | Thickness | Uniformity | ||
| ~7inch | AZ 1500 | 5000 Å | ±1% | Square/Circle |
| 9inch~ | AZ 1500 | 7000 Å | ±5% | Square |
| TFP650 | 10000 Å | ±5% | Square | |
Chrome Film Specification
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| Item | Condition | Instrument | Type-1 | Type-2 |
|---|---|---|---|---|
| Film Thickness | LRC | Alpha-stepIQ/KLA-Tencor | 1000±80 Å | 1250±100 Å |
| Optical density | 450nm | D200Ⅱ/Macbeth | 3.1±0.2 | 4.0±0.2 |
| Reflectivity | 436nm | U-3010/Varian | 11±2% | 11±2% |
Quartz
substrates
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| Type |
Dimension and Thickness (inch) |
Flatness (μm) | Dimension (mm) | Thickness (mm) | ||
|---|---|---|---|---|---|---|
| min | max | min | max | |||
| 4004 | 4.0×4.0×0.04 | ≤5 | 101.0 | 101.4 | 1.05 | 1.10 |
| 4006 | 4.0×4.0×0.06 | ≤5 | 100.8 | 101.6 | 1.40 | 1.60 |
| 4009 | 4.0×4.0×0.09 | ≤5 | 100.8 | 101.6 | 2.20 | 2.40 |
| 5006 | 5.0×5.0×0.06 | ≤5 | 126.4 | 126.8 | 1.55 | 1.60 |
| 5009 | 5.0×5.0×0.09 | ≤5 | 126.2 | 127.0 | 2.20 | 2.40 |
| 6004 | 6.0×6.0×0.04 | ≤5 | 151.8 | 152.2 | 1.05 | 1.10 |
| 6009 | 6.0×6.0×0.09 | ≤6 | 151.6 | 152.4 | 2.20 | 2.40 |
| 6012 | 6.0×6.0×0.12 | ≤6 | 151.6 | 152.4 | 2.95 | 3.15 |
| 6025 | 6.0×6.0×0.25 | ≤5 | 151.6 | 152.4 | 6.25 | 6.45 |
| 7010 | 7.0×7.0×0.10 | ≤10 | 177.0 | 177.8 | 2.40 | 2.60 |
| 7012 | 7.0×7.0×0.12 | ≤10 | 177.0 | 177.8 | 2.95 | 3.15 |
| 9012 | 9.0×9.0×0.12 | ≤15 | 228.2 | 229.0 | 3.00 | 3.20 |
Photoresist type
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| Resist | ||
|---|---|---|
| Resist type | Thickness | Uniformity |
| AZ 1500 | 5000 ű1% | ±1% |
| IP 3500 | 4600 ű1% | ±1% |
| IP 3600 | 4600 ű1% | ±1% |
Chrome Film Specification
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| Item | Condition | instrument | Type-1 | Type-2 |
|---|---|---|---|---|
| Film thickness | Alpha-stepIQ/KLA-Tencor | 1000±80 Å | 1250±100 Å | |
| Optical density | 450nm | D200Ⅱ/Macbeth | 3.1±0.2 | 4.0±0.2 |
| Reflectivity | 436nm | U-3010/Varian | 11±2% | 11±2% |